S00200 - SEMI S2 - 半導体製造装置の環境，健康，安全に関するガイドライン Revision:SEMI S2-0818 - Superseded 5 Equipment suppliers should work

5 Equipment suppliers should work with their customers to determine which additional GEM capabilities should be implemented for a specific type of equipment

The lack of a common terminology complicates comparison of tools

Organic compounds are present in many materials such as parts and components for cleanrooms

SEMI E113-1103 (technical revision)

S00200 - SEMI S2 - 半導体製造装置の環境，健康，安全に関するガイドライン Revision:SEMI S2-0818 - Superseded 5 Equipment suppliers should workNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI environmental, health, and safetyEHS Referenced SEMI Standards (purchase separately) SEMI E6 Guide for Semiconductor Equipment Installation Documentation SEMI F5 Guide for Gaseous Effluent Handling SEMI F14 Guide for the Design of Gas