E01700 - SEMI E17 - マスフローコントローラの過渡特性テストのガイド StdPbc-0118 3D normal luminance uniformity
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Description
3D normal luminance uniformity
本測定方法は,はんだボールの寸法を測定するために用いられる。これらの測定データは出荷試験レポートに使うことができる。
the actual wafer diameter may differ slightly due to process requirements
4 This Test Method covers determination of repeatability over a period of one week
E01700 - SEMI E17 - マスフローコントローラの過渡特性テストのガイド StdPbc-0118 3D normal luminance uniformityglobal Gases Committee2011912global Audits and Reviews Subcommittee201110www. semiviews. org www. semi. org1991 20073 MFC Referenced SEMI Standards None.
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