F05200 - SEMI F52 - Dimensional Specification for Metric PFA Tubes for Semiconductor and Flat Panel Display Manufacturing Revision:SEMI F52-0600 - Superseded Czochralski technique or other controlled

Czochralski technique or other controlled solidification methods

SEMI F15-93 (Reapproved 1104)

SEMI A1-1020 (technical revision)

and substrate ID

F05200 - SEMI F52 - Dimensional Specification for Metric PFA Tubes for Semiconductor and Flat Panel Display Manufacturing Revision:SEMI F52-0600 - Superseded Czochralski technique or other controlledThis specification was technically approved by the Global Liquid Chemical Distribution Systems Committee and is the direct responsibility of the Japanese Liquid Chemical Distribution Systems Committee. Current edition approved by the Japanese Regional Standards Committee on June 19, 2001. Initially available on www. semi. org August 2001; to be published November 2001. Originally published June 2000. NOTICE: This Standard or Safety Guideline has an